Dry Process Engineering

Course title

C0650600

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Course description

Various materials such as organic, inorganic, or organic-inorganic hybrid materials has been widely used in various fields. These materials have various functionalities depending on the application. Dry process is a means to impart and improve the functionalities of the materials. In this lecture, the principle of vacuum required to perform dry process will be explained at first, and the principle and application of various dry processes will be studied. In addition, practical examples using dry processes will be introduced and the latest dry process will be also explained.

Purpose of class

Purpose of this lecture is to study the principle of vacuum required to perform dry process and the principle and application of various dry processes. In addition, practical examples using dry processes will be introduced and the latest dry process will be also explained.

Goals and objectives

Understanding of vacuum principle
Understanding of principle for surface modification by dry processes
Understanding of importance and application of the dry processes

Language

Japanese(English accepted)

Class schedule

	Class schedule	HW assignments (Including preparation and review of the class.)	Amount of Time Required
1.	Overview of dry processes 　　・Introduction of dry processes 　　・Application of dry processes	Survey on dry processe	30minutes
2.	Basis of vacuum 　　・Unit of vacuum　・Properties of gas	Survey of the properties of gas	100minutes
3.	Vacuum pump and measurement 　　・Vacuum pump　・Measurement methods of vacuum	Review of the properties of gas	100minutes
4.	Vacuum equipment 　　・Principle of evacuation　・Detection of leakage	Survey of references on vacuum equipment	100minutes
5.	Basis of thin film 　　・Chemical adsorption　・Physical adsorption　・Growth of thin film	Survey on deposition processes of thin film	100minutes
6.	Plasma processes 　　・Plasma 　　・Principle and application of plasma	Survey on plasma processes	100minutes
7.	Physical vapor deposition (PVD) 　　・Principle of physical vapor deposition 　　・Vacuum deposition 　　・Sputtering	Survey on physical vapor deposition	100minutes
8.	Ion-plating 　　・Principle of ion-plating 　　・Application of ion-plating	Survey on ion-plating processe	100minutes
9.	Chemical vapor deposition-I (CVD) 　　・Principle of CVD processe 　　・Plasma CVD　・Thermal CVD	Survey on CVD processes	100minutes
10.	Chemical vapor deposition-II (CVD) 　　・Photo CVD　・Metal-organic CVD 　・Plasma polymerization 　　・Application of CVD processe	Survey on CVD processes	100minutes
11.	Industrial application of dry processes 　　・Plasma processes 　　・PVD processes	Understanding of contents of the lecture by reading documents distributed	100minutes
12.	Estimation methods of thin film 　　・Film thickness　・Chemical composition　　・Structural analysis	Survey on estimation methods of thin film	100minutes
13.	Review of dry processes 　　・Group presentation on dry processes	Review of dry processes	100minutes
14.	Term-end examination and comments	Understanding of contents of the lecture by reading documents distributed	120minutes
Total.	-	-	1350minutes

Relationship between 'Goals and Objectives' and 'Course Outcomes'

	Dry process	Total.
1.	30%	30%
2.	30%	30%
3.	40%	40%
Total.	100%	-

Evaluation method and criteria

Final grade point will be determined by reports, term-end examination, and group presentation.

Textbooks and reference materials

N/A

Prerequisites

Basis of surface modification methods

Office hours and How to contact professors for questions

Visit the office with appointment
Monday(12:20-13:00) at Toyosu campus.

Relation to the environment

Environment education course (50%)

Regionally-oriented

Non-regionally-oriented course

Development of social and professional independence

Course that cultivates an ability for utilizing knowledge

Active-learning course

More than one class is interactive

Last modified : Wed Oct 17 06:29:11 JST 2018