Course title
A07441003
Micro/nano engineering

 matsuo shigeki
Course description
With the miniaturization of various mechanical and electronic devices, the importance of precision processing technology is increasing in modern engineering. In addition to microfabrication by traditional technology, micro-nano processing technology applying semiconductor processing technology has become the basic technology supporting electronics, microelectromechanical systems (MEMS), information communication and so on. As a result, observation and measurement technology of micro/nano structures are also developing, and knowledge concerning these techniques is important for mechanical engineers. In this course, students will learn the principles, basic knowledge and application of microfabrication technology and related technologies.
Purpose of class
To learn basic concepts and technology of micro/nano technology engineering.
To learn micro/nano observation and measurement techniques.
To learn micro/nano fabrication techniques.
To learn applications of micro/nano technology, and think its future developments.
Goals and objectives
  1. To be able to explain basic concepts and technology of micro/nano technology engineering.
  2. To be able to explain micro/nano observation and measurement techniques and their principle.
  3. To be able to explain micro/nano fabrication techniques and their principle.
  4. To be able to explain applications of micro/nano technology.
Language
Japanese
Class schedule

 Class schedule HW assignments (Including preparation and review of the class.) Amount of Time Required
1. Introduction, Basic concept of micro/nano engineering review (handout) 190minutes
2. Precise mechanical processing review (handout) 190minutes
3. Precise mechanical measurement review (handout) 190minutes
4. Vacuum review (handout) 190minutes
5. Electron microscopy review (handout) 190minutes
6. Scanning probe microscopy review (handout) 190minutes
7. Thin film technology review (handout) 190minutes
8. Photolithography review (handout) 190minutes
9. Wet and dry etching review (handout) 190minutes
10. Laser processing review (handout) 190minutes
11. Micro-Electro-Mechanical-Systems (MEMS) review (handout) 190minutes
12. Applications of MEMS (1) review (handout) 190minutes
13. Applications of MEMS (2) report 190minutes
14. Review and final exam review 190minutes
Total. - - 2660minutes
Relationship between 'Goals and Objectives' and 'Course Outcomes'

 final exam report quiz Total.
1. 5% 3% 2% 10%
2. 20% 12% 8% 40%
3. 15% 9% 6% 30%
4. 10% 6% 4% 20%
Total. 50% 30% 20% -
Evaluation method and criteria
Final exam 50%, Report 30 %, quiz at every class 20%.
To pass, students must earn at least 60 points out of 100.
Textbooks and reference materials
none
Prerequisites
Micro/nano engineering relates many field of science/technology, including physics, chemistry, mechanical engineering, electrical engineering.
Office hours and How to contact professors for questions
  • to be determined after the timetable was fixed.
Relation to the environment
Non-environment-related course
Regionally-oriented
Non-regionally-oriented course
Development of social and professional independence
  • Course that cultivates an ability for utilizing knowledge
Active-learning course
N/A
Course by professor with work experience
Work experience Work experience and relevance to the course content if applicatable
N/A 該当しない
Last modified : Thu Mar 21 14:10:11 JST 2019