科目情報
7M100500
Vacuum Technology and Surface Analysis / Vacuum Technology and Surface Analysis
教授 Rzeznicka Izabela Irena
授業の概要
The vacuum technology and surface analysis course aims to introduce students to the basic aspects of vacuum technology and surface analysis used in materials development and engineering research.
授業の目的
In the first part of the course, students will learn about physical aspects of vacuum and instrumentation used to generate vacuum and ultra-high vacuum (UHV). Later on, students will learn about photon and electron detectors. Finally, several techniques used to characterize and analyze metals and semiconductors surfaces will be introduced.
達成目標
  1. The students will be able to explain the differences of vacuum pumps and their applications.
  2. The students will be able to explain the differences of vacuum gauges and their applications.
  3. The students will be able to explain how electron and photon detectors are constructed and work.
  4. The students will be able to characterize surfaces of materials using electron and photon spectroscopies.
授業で使用する言語
英語
授業計画

授業計画 授業時間外課題(予習および復習を含む) 必要学習時間
1. Kinetic theory of gases. Molecule-molecule and molecule-surface interactions. Read handouts and review your own
knowledge on the topic.
190分
2. Collision processes in gases. Read handouts and review your own
knowledge on the topic.
190分
3. Vacuum generation. Vacuum pumps. Read handouts and review your own
knowledge on the topic.
190分
4. Total pressure gauges. Calibration of pressure gauges. Materials used in high vacuum chambers. Read handouts and review your own
knowledge on the topic.
190分
5. Photon detectors. Read handouts and review your own
knowledge on the topic.
190分
6. Electron detectors. Read handouts and review your own
knowledge on the topic.
190分
7. Mid-term exam and discussion of solutions to the problems in the exam. Read handouts and review your own
knowledge on the topic.
300分
8. Interaction of charged particles with surfaces. Read handouts and review your own
knowledge on the topic.
190分
9. Partial pressure analyzers. Mass spectrometers. Read handouts and review your own
knowledge on the topic.
190分
10. Surface structure analysis. Low-energy electron diffraction. Read handouts and review your own
knowledge on the topic.
190分
11. Auger electron spectroscopy. Read handouts and review your own
knowledge on the topic.
190分
12. X-ray photon spectroscopy. Read handouts and review your own
knowledge on the topic.
190分
13. Secondary ion mass spectrometry. Read handouts and review your own
knowledge on the topic.
190分
14. Final exam and discussion of solutions to the problems in the exam. Read handouts and review your own
knowledge on the topic.
300分
合計 - - 2880分
達成目標との対応・割合

Mid-term exam Final exam 合計
1. 10% 15% 25%
2. 10% 15% 25%
3. 10% 15% 25%
4. 10% 15% 25%
合計 40% 60% -
評価方法と基準
Evaluation will be performed on the basis of mid-term exam and final exam.

Mid-term exam will contribute 30% to your grade.
Final exam will contribute 60% to your grade.

Students need at least 60% of the full score to pass this course.
教科書・参考書
"Surface Analysis" by J. C. Vickerman, Wiley 2009
"The physical basis of ultrahigh vacuum" by P.A. Redhead, American Vacuum Society Classics
履修登録前の準備
Undergraduate level physics required.
オフィスアワー、質問・相談の方法
  • Contact via e-mail, the e-mail addresses to Dr. Izabela Rzeznicka: Izabela[at]shibaura-it.ac.jp
地域志向
地域志向ではない科目
社会的・職業的自立力の育成
  • 知識活用力を育成する科目
  • 対課題基礎力を育成する科目
アクティブ・ラーニング科目
該当しない
実務経験のある教員による授業科目
実務経験 具体的内容
該当しない N/A
SDGs(持続可能な開発目標)関連項目
  • 4.質の高い教育をみんなに
最終更新 : Sat Mar 21 14:18:10 JST 2020