In a small world, the force proportional to the area works strongly, and the influence of the force proportional to the volume
is small. This is why ants can walk freely on walls and ceilings, which is called the scaling effect. It is difficult to realize
the desired function in a small world with a normal design method. This is because of the influence of the scaling effect
and the fact that the normal size manufacturing method cannot be applied. In micro / nanotechnology, we use scaling effects
to understand effective designs in a small world and learn the basics of applicable manufacturing methods.
Understand how microengineering is actually used in information equipment and systems from actual examples of sensors and
actuators.
Understand the basics of manufacturing technology used in microengineering. In particular, learn the basic configuration and functions of vacuum equipment.
Understand the outline and mechanism of basic microengineering technology, cantilever, diaphragm, electrostatic actuator, etc. Learn what kind of function is created by combining these with actual examples.
Understand the basics of manufacturing technology used in microengineering. In particular, learn the basic configuration and functions of vacuum equipment.
Understand the outline and mechanism of basic microengineering technology, cantilever, diaphragm, electrostatic actuator, etc. Learn what kind of function is created by combining these with actual examples.
- Understand the basics of manufacturing methods in micro / nano engineering.
- Understand the basics of vacuum equipment.
- Understand the scaling effect and analyze the operation of the electrostatic actuator.
| Class schedule | HW assignments (Including preparation and review of the class.) | Amount of Time Required | |
|---|---|---|---|
| 1. | Overview of micro / nano engineering | Find out about MEMS. | 190minutes |
| 2. | Use of micro technology 1 ・ Applications and mechanisms of electronic information devices ・ Sensor example 1 using micro technology |
We will investigate the microtechnology used in information equipment. | 190minutes |
| 3. | Use of micro technology 2 ・ Sensor example 2 using micro technology |
Review the actual mechanism of the system using sensors. | 190minutes |
| 4. | Micro Technology Element 1 ・ Spring mass system ・ Electrostatic actuator ・ Leaf spring and bending spring analysis |
Review the secondary vibration system. | 190minutes |
| 5. | Micro technology element 2 ・ Resonance phenomenon ・ Driving principle (piezo effect, Lorentz force, capillarity, ...) |
Review the driving methods. | 190minutes |
| 6. | Micro manufacturing technology 1 ・ Photolithography ・ Film formation technology (sputtering method, vapor deposition method, CVD) ・ Etching technology (dry etching, wet etching, isotropic / anisotropic etching) ・ Lift-off and reverse taper photosensitive resist |
Review the micro-manufacturing technology. | 190minutes |
| 7. | Micro manufacturing technology 2 ・ Silicon deep digging device ・ Sacrificial layer etching ・ Dicing bonding ・ CMOS post process |
We will investigate the process using the silicon deep digging device. | 190minutes |
| 8. | Mid-term exam. for week 1-7. | Investigate and confirm exam questions. | 190minutes |
| 9. | Vacuum device ・ Exhaust system: Vacuum pump ・ Pressure sensor (IG, B-A gauge, Schultz gauge) ・ Ceiling ・ Leak check ・ Flow meter ・ plasma |
Review the vacuum device. | 190minutes |
| 10. | Nanotechnology ・ Nano-order processing technology (electron beam direct drawing litho, electron beam beam processing, high-speed atom beam [FAB] processing) ・ surface treatment ・ Self-assembled monolayer (SAM film) |
Review nanotechnology. | 190minutes |
| 11. | Applied technology 1 ・ Cars, home appliances ・ Telecommunications |
We will investigate actual application examples. | 190minutes |
| 12. | Applied technology 2 ・ Manufacturing and inspection ・ Medical and bio |
We will investigate actual application examples. | 190minutes |
| 13. | Applied technology 3 ・ Recent trends in microtechnology |
Read microfluidics treatises. | 190minutes |
| 14. | Final exam. for week 9-13. | We will review and summarize the entire micro / nano engineering field. | 190minutes |
| Total. | - | - | 2660minutes |
| mid-term exam | reports | final exam. | Total. | |
|---|---|---|---|---|
| 1. | 20% | 20% | 40% | |
| 2. | 20% | 20% | ||
| 3. | 20% | 20% | 40% | |
| Total. | 40% | 20% | 40% | - |
Evaluate with 40% of mid-term exams, 20% of assignment reports, and 20% of final exams. Pass 60 points or more.
The 60-point level is defined as being able to explain the outline of the basic method of the micro / nano manufacturing method, the structure and principle of the vacuum device, and to be able to perform basic calculations on the generated force of the electrostatic actuator.
The 60-point level is defined as being able to explain the outline of the basic method of the micro / nano manufacturing method, the structure and principle of the vacuum device, and to be able to perform basic calculations on the generated force of the electrostatic actuator.
教科書：MEMSデバイス徹底入門-「つかう」「わかる」「つくる」マイクロマシン・センサ- ，三田吉郎，日刊工業新聞社
Textbook: Thorough Introduction to MEMS Devices-"Use", "Understand", "Make" Micromachine Sensors-, Yoshiro Mita, Nikkan Kogyo Shimbun
参考書：はじめてのMEMS，江刺 正喜 ，森北出版
Reference book: First MEMS, Masayoshi Esashi, Morikita Publishing
Textbook: Thorough Introduction to MEMS Devices-"Use", "Understand", "Make" Micromachine Sensors-, Yoshiro Mita, Nikkan Kogyo Shimbun
参考書：はじめてのMEMS，江刺 正喜 ，森北出版
Reference book: First MEMS, Masayoshi Esashi, Morikita Publishing
- Questions will be asked at Nagasawa Laboratory from 12:40 to 13:00 on Thursday. It is sure to make an appointment by e-mailing in advance or contacting us at the time of the lecture.
- Course that cultivates an ability for utilizing knowledge
| Work experience | Work experience and relevance to the course content if applicable |
|---|---|
| N/A | Not applicable |
- 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
- 12.RESPONSIBLE CONSUMPTION & PRODUCTION
Last modified : Wed May 12 04:52:53 JST 2021