The vacuum technology and surface analysis course aims to introduce students to the basic aspects of vacuum technology and
surface analysis used in materials development and engineering research.
In the first part of the course, students will learn about the physical aspects of vacuum and instrumentation used to generate
vacuum and ultra-high vacuum (UHV). Later on, students will learn about photon and electron detectors. Finally, several techniques
used to characterize and analyze metals and semiconductor surfaces will be introduced.
- The students will be able to explain the differences of vacuum pumps and their applications.
- The students will be able to explain the differences of vacuum gauges and their applications.
- The students will be able to explain how electron and photon detectors are constructed and work.
- The students will be able to characterize surfaces of materials using electron and photon spectroscopies.
| Class schedule | HW assignments (Including preparation and review of the class.) | Amount of Time Required | |
|---|---|---|---|
| 1． | Kinetic theory of gases. Molecule-molecule and molecule-surface interactions. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 2． | Collision processes in gases. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 3． | Vacuum generation. Vacuum pumps. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 4． | Total pressure gauges. Calibration of pressure gauges. Materials used in high vacuum chambers. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 5． | Photon detectors. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 6． | Electron detectors. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 7． | Mid-term exam and discussion of solutions to the problems in the exam. | Read handouts and review your own knowledge on the topic. |
300minutes |
| 8． | Interaction of charged particles with surfaces. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 9． | Partial pressure analyzers. Mass spectrometers. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 10． | Surface structure analysis. Low-energy electron diffraction. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 11． | Auger electron spectroscopy. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 12． | X-ray photon spectroscopy. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 13． | Secondary ion mass spectrometry. | Read handouts and review your own knowledge on the topic. |
190minutes |
| 14． | Final exam and discussion of solutions to the problems in the exam. | Read handouts and review your own knowledge on the topic. |
300minutes |
| Total. | - | - | 2880minutes |
| Mid-term exam | Final exam | Short Quizess | Total. | |
|---|---|---|---|---|
| 1. | 15% | 5% | 5% | 25% |
| 2. | 15% | 5% | 5% | 25% |
| 3. | 5% | 15% | 5% | 25% |
| 4. | 5% | 15% | 5% | 25% |
| 5. | 0% | 0% | ||
| 6. | 0% | 0% | ||
| Total. | 40% | 40% | 20% | - |
Evaluation will be performed on the basis of short quizzes online mid-term exam and final exam online.
Short quizzes will contribute 20% to your grade.
Mid-term exam will contribute 40% to your grade.
Final exam will contribute 40% to your grade.
Students need at least 60% of the full score to pass this course.
Short quizzes will contribute 20% to your grade.
Mid-term exam will contribute 40% to your grade.
Final exam will contribute 40% to your grade.
Students need at least 60% of the full score to pass this course.
"Surface Analysis" by J. C. Vickerman, Wiley 2009
"The physical basis of ultrahigh vacuum" by P.A. Redhead, American Vacuum Society Classics
Lecture slides will be electronically distributed before each class.
"The physical basis of ultrahigh vacuum" by P.A. Redhead, American Vacuum Society Classics
Lecture slides will be electronically distributed before each class.
- Contact via e-mail, the e-mail addresses to Dr. Izabela Rzeznicka: Izabela[at]shibaura-it.ac.jp
- Course that cultivates an ability for utilizing knowledge
- Course that cultivates a basic problem-solving skills
| Work experience | Work experience and relevance to the course content if applicable |
|---|---|
| N/A | N/A |
Last modified : Fri Mar 18 23:15:56 JST 2022