Course title
A07441003
Micro/nano engineering

 MATSUO Shigeki
Course description
With the miniaturization of various mechanical and electronic devices, microfabrication technology is becoming increasingly important in modern engineering. In addition to precision and microfabrication using traditional machining technology, micro-nano machining technology based on special machining technology such as laser processing and semiconductor processing technology have become a fundamental technology that supports electronics, micro-electromechanical systems (MEMS), and information communication. As a result, observation and measurement technologies for micro/nano structures are also continuously developing, and knowledge of these technologies is important for mechanical engineers. In this course, students will learn the principles and basic knowledge of microfabrication technology and related technologies, and their applications.
Purpose of class
To learn basic concepts and technology of micro/nano technology engineering.
To learn micro/nano observation and measurement techniques.
To learn micro/nano fabrication techniques.
To learn applications of micro/nano technology, and think its future developments.
Goals and objectives
  1. To be able to explain basic concepts and technology of micro/nano technology engineering.
  2. To be able to explain micro/nano observation and measurement techniques and their principle.
  3. To be able to explain micro/nano fabrication techniques and their principle.
  4. To be able to explain applications of micro/nano technology.
Language
Japanese
Class schedule

 Class schedule HW assignments (Including preparation and review of the class.) Amount of Time Required
1. Introduction, Basic concept of micro/nano engineering review (handout) 190minutes
2. Precise mechanical measurement review (handout) 190minutes
3. Precise mechanical processing review (handout) 190minutes
4. Non-traditional machining review (handout) 190minutes
5. Vacuum technology review (handout) 190minutes
6. Optical microscopy review (handout) 190minutes
7. Electron microscopy review (handout) 190minutes
8. Scanning probe microscopy review (handout) 190minutes
9. Film Deposition Technology review (handout) 190minutes
10. Photolithography review (handout) 190minutes
11. Etching review (handout) 190minutes
12. Crystal structure analysis and other atomic level characterization techniques review (handout) 190minutes
13. Micro-Electro-Mechanical-Systems (MEMS) and their applications report 190minutes
14. Review and final exam review 190minutes
Total. - - 2660minutes
Relationship between 'Goals and Objectives' and 'Course Outcomes'

 final exam report quiz Total.
1. 2% 4% 4% 10%
2. 6% 12% 12% 30%
3. 8% 16% 16% 40%
4. 4% 8% 8% 20%
Total. 20% 40% 40% -
Evaluation method and criteria
Final exam 50%, Report 30 %, quiz at every class 20%.
To pass, students must earn at least 60 points out of 100.
Textbooks and reference materials
none
Prerequisites
Micro/nano engineering relates many field of science/technology, including physics, chemistry, mechanical engineering, electrical engineering.
Office hours and How to contact professors for questions
  • to be determined after the timetable was fixed.
Regionally-oriented
Non-regionally-oriented course
Development of social and professional independence
  • Course that cultivates an ability for utilizing knowledge
Active-learning course
N/A
Course by professor with work experience
Work experience Work experience and relevance to the course content if applicable
N/A 該当しない
Education related SDGs:the Sustainable Development Goals
  • 7.AFFORDABLE AND CLEAN ENERGY
  • 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
  • 12.RESPONSIBLE CONSUMPTION & PRODUCTION
Last modified : Fri Mar 18 23:26:00 JST 2022