Course title
4M7102001
Microscale Machines and Mechanics

 ONO Naoki

NAGASAWA Sumito

YOSHIDA Shinya
Course content
1) One of the important issues in microscale fluid systems is surface-tension related phenomenon. Students learn basic physics and mechanics in analyzing surface tension phenomena.

2) Students study general principles of micro sensors and actuators.

3) Students understand basics concepts of Micro-Electro-Mechanical Systems (MEMS) techniques.
Purpose of class
To learn basic knowledge about mechanics, materials, devices and fluid mechanics in the microscale systems, and to obtain basic skills to apply them to research and development activities.
Goals and objectives
  1. 1) To understand basic equations about surface tension mechanics and to apply them to practical problems.
  2. 2) To understand the principle of micro sensors and actuators.
  3. 3) To understand basic MEMS fabrication techniques and to apply micro devices to practical problems.
Language
English
Class schedule

 Class schedule HW assignments (Including preparation and review of the class.) Amount of Time Required
1． Introduction of surface tension related phenomena in microscale systems Preview of handout materials 190minutes
2． Surface tension phenomena (1) Preview of handout materials 190minutes
3． Surface tension phenomena (2) Preview of handout materials 190minutes
4． Surface tension phenomena (3) Preview of handout materials 190minutes
5． Introduction of micro sensors and actuators Preview of handout materials 190minutes
6． Principles of micro sensors and actuators (1) Preview of handout materials 190minutes
7． Principles of micro sensors and actuators (2) Preview of handout materials 190minutes
8． Principles of micro sensors and actuators (3) Preview of handout materials 190minutes
9． Introduction of Micro-Electro-Mechanical Systems Preview of handout materials 190minutes
10． Photolithography / Patterning Preview of handout materials 190minutes
11． Deposition / Etching materials Preview of handout materials 190minutes
12． MEMS device applications Preview of handout materials 190minutes
13． Review(1) or special lecture by a guest researcher Preview of handout materials 190minutes
14． Review(2) or special lecture by a guest researcher Preview of handout materials 190minutes
Total. - - 2660minutes
Relationship between 'Goals and Objectives' and 'Course Outcomes'

 Reports Total.
1. 34% 34%
2. 33% 33%
3. 33% 33%
Total. 100% -
Evaluation method and criteria
Three report papers will be evaluated comprehensively. The total score is 100 points, and 60 points or more is the passing score.
Achievement level:
To understand basic knowledge about mechanics, materials and fluid mechanics in the microscale systems, and to apply them to research and development activities.
Feedback on exams, assignments, etc.
ways of feedback specific contents about "Other"
Feedback in the class
Textbooks and reference materials
Necessary handout materials will be given during the lecture.
Prerequisites
Nothing in particular.
Office hours and How to contact professors for questions
  • It is advised to make appointments in advance.
Regionally-oriented
Non-regionally-oriented course
Development of social and professional independence
  • Course that cultivates an ability for utilizing knowledge
Active-learning course
N/A
Course by professor with work experience
Work experience Work experience and relevance to the course content if applicable
Applicable One of the lecturers had an experience of researching and developing material manufacturing processes at a material manufacturer. He will teach how to apply the mechanics and the knowledge about surface tension issues necessary for the development and application of various thermo-fluid processes.
Education related SDGs:the Sustainable Development Goals
  • 4.QUALITY EDUCATION
  • 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
Last modified : Sat Sep 09 05:49:48 JST 2023