Microelectromechanical systems (MEMS) and electronic circuits are commonplace in our surroundings. In order to research and
develop these devices and systems, a broad knowledge of processing methods, measurement and analysis techniques is required.
In this class, students will study the above basic knowledge through classroom lectures, and acquire universal knowledge and skills that engineers of device systems should have through actual use of devices and equipment.
Students will also learn basic skills (research, reading, writing, speaking, etc.) essential for research activities through reading the latest academic papers and presentations.
In this class, students will study the above basic knowledge through classroom lectures, and acquire universal knowledge and skills that engineers of device systems should have through actual use of devices and equipment.
Students will also learn basic skills (research, reading, writing, speaking, etc.) essential for research activities through reading the latest academic papers and presentations.
To understand the basic knowledge of microelectromechanical systems (MEMS) and electronic circuit fabrication technologies.
To understand the fundamentals of microfabrication technologies and device measurement and analysis methods.
To acquire the basic skills required in the field of research and development.
To understand the fundamentals of microfabrication technologies and device measurement and analysis methods.
To acquire the basic skills required in the field of research and development.
- To be able to read and understand academic papers accurately. Communicate the contents accurately and clearly to others.
- To understand and explain basic techniques of semiconductor microfabrication technology.
To understand and explain the principles of micro sensors and actuators. - To understand the principles of general-purpose measuring and analytical instruments such as oscilloscopes and electron microscopes, and to use them correctly.
| Class schedule | HW assignments (Including preparation and review of the class.) | Amount of Time Required | |
|---|---|---|---|
| 1. | Basic Skills for Research (1) | Practice what you learn in class. | 190minutes |
| 2. | Basic Skills for Research (2) | Practice what you learn in class. | 190minutes |
| 3. | Practical training: Reading academic papers | Research academic papers | 190minutes |
| 4. | Practice: Presentation (1) | Prepare presentation materials | 190minutes |
| 5. | Practice: Presentation (2) | Prepare presentation materials | 190minutes |
| 6. | Introduction to Micro Sensors and Actuators | Review what was learned in class. | 190minutes |
| 7. | Overview of microdevice fabrication technology (1) | Review what was learned in class. | 190minutes |
| 8. | Overview of microdevice fabrication technology (2) | Review what was learned in class. | 190minutes |
| 9. | Vacuum Technology | Review what was learned in class. | 190minutes |
| 10. | Introduction to Measurement Technology | Review what was learned in class. | 190minutes |
| 11. | Practical training: Prototyping and measurement of electronic circuits | Investigate electronic circuits | 190minutes |
| 12. | Introduction to Analytical Technology | Review what was learned in class. | 190minutes |
| 13. | Practical training: Observation and analysis by scanning electron microscope | Investigate the object of observation | 190minutes |
| 14. | Latest Topics | Review what was learned in class. | 190minutes |
| Total. | - | - | 2660minutes |
| Quiz | Report | Presentation | Total. | |
|---|---|---|---|---|
| 1. | 30% | 30% | ||
| 2. | 30% | 30% | ||
| 3. | 40% | 40% | ||
| Total. | 30% | 40% | 30% | - |
The evaluation will consist of a quiz (30%), presentation (30%), and report (40%). 60 points or more is required to pass the
course.
Students should be able to explain the principles and structures of semiconductor microfabrication technology, sensors and actuators, and vacuum devices. The student should also possess basic knowledge of general-purpose measuring instruments such as oscilloscopes, and have academic reading and presentation skills.
Students should be able to explain the principles and structures of semiconductor microfabrication technology, sensors and actuators, and vacuum devices. The student should also possess basic knowledge of general-purpose measuring instruments such as oscilloscopes, and have academic reading and presentation skills.
| ways of feedback | specific contents about "Other" |
|---|---|
| Feedback in outside of the class (ScombZ, mail, etc.) |
参考書
知っておきたい計測器の基本―テスター、オシロ、ネットアナ、スペアナ、ロジアナの原理と使いこなし、 大内 繁男 (著), 坂巻 佳壽美 (著) 、オーム社
はじめてのMEMS 単行本，江刺 正喜 (著)，森北出版株式会社
知っておきたい計測器の基本―テスター、オシロ、ネットアナ、スペアナ、ロジアナの原理と使いこなし、 大内 繁男 (著), 坂巻 佳壽美 (著) 、オーム社
はじめてのMEMS 単行本，江刺 正喜 (著)，森北出版株式会社
- Questions and consultations are accepted after class.
- Course that cultivates a basic interpersonal skills
- Course that cultivates an ability for utilizing knowledge
| Work experience | Work experience and relevance to the course content if applicable |
|---|---|
| N/A |
Last modified : Sat Sep 09 05:23:58 JST 2023