Graduation Thesis 1

Japanese(English accepted)

マイクロロボティクス研究

The dominant phenomenon in the small scale world is different from the phenomenon in the scale world in which humans live. Therefore, even if the usual design concept is applied as it is to the design of a system that operates in a small scale world, it does not work. It is necessary to study a system design method suitable for the scale while considering the scale effect. MEMS (Micro-Electro-Mechanical Systems) manufactures mechanical electrical systems on a small scale with high accuracy. Micro electromechanical systems are not only small and light, but also have the characteristics of being able to manufacture products of the same quality at low cost, with high sensitivity and good responsiveness. As one of the applications, the main research theme is to apply it as a sensor for small robots.
In Graduation Research 1, the background of the research theme and the significance of the research are understood, the research goals and the methods for realizing them are clarified, and an implementation plan is made. In addition to individual themes, students will learn basic knowledge about film formation, lithography, and etching, which are the basic elemental technologies of MEMS technology, and how to use the sputtering equipment, aligner, and deep-RIE equipment, which are typical equipment of each elemental technology. To do. In addition, how to use the embedded microcomputer and how to make a photosensitive substrate for electronic circuits including auto-routing will be learned as common skills in the laboratory.

Most classes are interactive

• 4.QUALITY EDUCATION
• 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
• 12.RESPONSIBLE CONSUMPTION & PRODUCTION