Vacuum Technology and Surface Analysis

Course title

7M100500

Course content

The vacuum technology and surface analysis course aims to introduce students to the basic aspects of vacuum technology and surface analysis used in materials development and engineering research.

Purpose of class

In the first part of the course, students will learn about the physical aspects of vacuum and instrumentation used to generate vacuum and ultra-high vacuum (UHV). Later on, students will learn about photon and electron detectors. Finally, several techniques used to characterize and analyze metals and semiconductor surfaces will be introduced.

Goals and objectives

The students will be able to explain the differences of vacuum pumps and their applications.
The students will be able to explain the differences of vacuum gauges and their applications.
The students will be able to explain how electron and photon detectors are constructed and work.
The students will be able to characterize surfaces of materials using electron and photon spectroscopies.

Relationship between 'Goals and Objectives' and 'Course Outcomes'

	Mid-term exam	Final exam	Total.
1.	15%	5%	20%
2.	15%	15%	30%
3.	10%	15%	25%
4.	10%	15%	25%
Total.	50%	50%	-

Language

English

Class schedule

	Class schedule	HW assignments (Including preparation and review of the class.)	Amount of Time Required
1．	Kinetic theory of gases. 11/25	Read handouts and review your own knowledge on the topic.	190minutes
2．	Collision processes in gases. 11/25	Read handouts and review your own knowledge on the topic.	190minutes
3．	Vacuum generation. Vacuum pumps. 12/2	Read handouts and review your own knowledge on the topic.	190minutes
4．	Total pressure gauges. Calibration of pressure gauges. Materials used in high vacuum chambers. 12/2	Read handouts and review your own knowledge on the topic.	190minutes
5．	Photon detectors part I. 12/9	Read handouts and review your own knowledge on the topic.	190minutes
6．	Photon detectors part II. 12/9	Read handouts and review your own knowledge on the topic.	190minutes
7．	Mid-term exam and discussion of solutions to the problems in the exam. 12/16	Read handouts and review your own knowledge on the topic.	300minutes
8．	Electron Analyzers. Auger electron spectroscopy. 12/16	Read handouts and review your own knowledge on the topic.	190minutes
9．	X-ray photon spectroscopy part I. 12/23	Read handouts and review your own knowledge on the topic.	190minutes
10．	X-ray photon spectroscopy part II. 12/23	Read handouts and review your own knowledge on the topic.	190minutes
11．	Partial pressure analyzers. Mass spectrometers. 1/20	Read handouts and review your own knowledge on the topic.	190minutes
12．	Charged particles detectors. Secondary ion mass spectrometry. 1/20	Read handouts and review your own knowledge on the topic.	190minutes
13．	Surface structure analysis. Low-energy electron diffraction. 1/27	Read handouts and review your own knowledge on the topic.	190minutes
14．	Final exam and discussion of solutions to the problems in the exam. 1/27	Read handouts and review your own knowledge on the topic.	300minutes
Total.	-	-	2880minutes

Evaluation method and criteria

Evaluation will be performed on the basis of the mid-term exam and final exam.

Students need at least 60% of the full score to pass this course.

Feedback on exams, assignments, etc.

ways of feedback	specific contents about "Other"
The Others	Feedback is provided during office hours. Pls contact teacher in charge and make appointment.

Textbooks and reference materials

"Surface Analysis" by J. C. Vickerman, Wiley 2009
"The physical basis of ultrahigh vacuum" by P.A. Redhead, American Vacuum Society Classics

Lecture slides will be electronically distributed before each class.

Prerequisites

Undergraduate level physics required.

Office hours and How to contact professors for questions

Contact via e-mail, the e-mail addresses to Dr. Izabela Rzeznicka: Izabela[at]shibaura-it.ac.jp

Regionally-oriented

Non-regionally-oriented course

Development of social and professional independence

Course that cultivates an ability for utilizing knowledge
Course that cultivates a basic problem-solving skills

Active-learning course

About half of the classes are interactive

Course by professor with work experience

Work experience	Work experience and relevance to the course content if applicable
N/A	N/A

Education related SDGs:the Sustainable Development Goals

4.QUALITY EDUCATION

Last modified : Wed Mar 06 04:14:10 JST 2024