Course title
4M0091001
Microsystem Integration /Exercise1

YOSHIDA Shinya
Course content
We discover new insights or develop new technologies related to MicroElectroMechanical Systems (MEMS) and micromachining.
We also create "small, smart, and useful devices and systems" with high-density integration of MEMS and electronic circuits.
The obtained results is contributed to society through oral presentations at academic conferences, submission of papers to academic journals, and technology transfer to companies.
Goals and objectives
  1. To acquire research methods and experimental/analytical techniques for MEMS and microfabrication technologies.
  2. To conduct bibliographic searches of academic papers, etc., to investigate the circumstances surrounding the research.
  3. To make the results obtained by the research into academic papers, lecture papers, and intellectual property.
Language
Japanese(English accepted)
Class schedule
1. Bi-weekly progress reports and presentations on research topics about once every three months.
2. Investigation of experimental methods and fabrication of devices, systems, and experimental apparatuses. 3) Simulation using analysis software.
3. Simulation using analysis software
4. Analysis of experimental results and compilation of data
Evaluation method and criteria
A report on research progress, ingenuity in examining experimental methods, attitude toward research, analysis of experimental results and compilation of analytical data are comprehensively evaluated on a 100-point scale. A score of 60 or more is considered passing.
Feedback on exams, assignments, etc.
ways of feedback specific contents about "Other"
Textbooks and reference materials
「はじめてのMEMS」江刺 正喜 (著)、森北出版
「これからのMEMS:LSIとの融合」江刺 正喜 (著)、森北出版
「MEMSデバイス徹底入門-「つかう」「わかる」「つくる」マイクロマシン・センサ」三田 吉郎 (著)、日刊工業新聞社
Prerequisites
It is desirable to acquire general knowledge of mechanical and electronic circuits and sensor technology.
Office hours and How to contact professors for questions
  • I will respond when I am in the lab.
Regionally-oriented
Non-regionally-oriented course
Development of social and professional independence
  • Course that cultivates an ability for utilizing knowledge
  • Course that cultivates a basic self-management skills
  • Course that cultivates a basic interpersonal skills
  • Course that cultivates a basic problem-solving skills
Active-learning course
Most classes are interactive
Course by professor with work experience
Work experience Work experience and relevance to the course content if applicable
N/A 該当しない
Education related SDGs:the Sustainable Development Goals
  • 1.NO POVERTY
  • 3.GOOD HEALTH AND WELL-BEING
  • 4.QUALITY EDUCATION
  • 8.DECENT WORK AND ECONOMIC GROWTH
  • 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
  • 12.RESPONSIBLE CONSUMPTION & PRODUCTION
Last modified : Thu Mar 13 04:15:33 JST 2025