Small sensors and actuators based on MEMS technology are widely used and pervasive in our daily lives.
Examples include fingerprint recognition in smartphones, rotation and tilt detection, wireless earphones, and elastic wave filters for communication.
However, they are so small and out of the public eye that they tend to be black boxes.
In this lecture, we will focus on the technology and principles of micro sensors and actuators, and learn about the history of the underlying physics, engineering, and technology used in these devices, as well as the latest inertial sensors, acoustic sensors, chemical sensors, and biosensors.
Examples include fingerprint recognition in smartphones, rotation and tilt detection, wireless earphones, and elastic wave filters for communication.
However, they are so small and out of the public eye that they tend to be black boxes.
In this lecture, we will focus on the technology and principles of micro sensors and actuators, and learn about the history of the underlying physics, engineering, and technology used in these devices, as well as the latest inertial sensors, acoustic sensors, chemical sensors, and biosensors.
Learn about the principles frequently used in micro-sensors and actuators and their respective characteristics.
Also learn about design and analysis methods for microdevices with simple structures.
Furthermore, learn about the entire process from manufacturing methods to implementation.
Also learn about design and analysis methods for microdevices with simple structures.
Furthermore, learn about the entire process from manufacturing methods to implementation.
- To understand and explain the basic principles of microsensors and actuators and their respective characteristics.
- To design microdevices with simple structures and understands analysis methods.
- To have a complete picture of the process from manufacturing methods to implementation.
| Quiz | Midterm test | Final exam | Total. | |
|---|---|---|---|---|
| 1. | 10% | 15% | 10% | 35% |
| 2. | 10% | 15% | 10% | 35% |
| 3. | 10% | 20% | 30% | |
| Total. | 30% | 30% | 40% | - |
The final grade will be determined by the following: 30% quiz, 30% mid-term exam, 40% final exam. A grade of 60 points or
above is considered to be a passing grade.
The level of 60 points is defined as being able to understand the general principles of micro-sensors and actuators, be able to explain the overall process from manufacturing to final product, and be able to partially explain the latest technological trends.
The level of 60 points is defined as being able to understand the general principles of micro-sensors and actuators, be able to explain the overall process from manufacturing to final product, and be able to partially explain the latest technological trends.
| Class schedule | HW assignments (Including preparation and review of the class.) | Amount of Time Required | |
|---|---|---|---|
| 1. | Introduction | Survey about MEMS technology and sensors/actuators | 190minutes |
| 2. | Microactuator | Review microactuators and related physical phenomena in the lecture. | 190minutes |
| 3. | Micro Sensors ① | Review the physical sensors and related physical phenomena in the lecture. | 190minutes |
| 4. | Micro Sensors ② | Review the physical sensors and related physical phenomena in the lecture. | 190minutes |
| 5. | Micro Sensors ③ | Review the chemical sensors and related physical phenomena in the lecture. | 190minutes |
| 6. | Micro Sensors ④ | Review the chemical sensors and related physical phenomena in the lecture. | 190minutes |
| 7. | Elastic Wave Filters | Review the elastic wave filters and related physical phenomena in the lecture. | 190minutes |
| 8. | Midterm exam and commentary | Review lessons 1 to 7. | 190minutes |
| 9. | Manufacturing method ① | Review the microfabrication techniques in the lecture. | 190minutes |
| 10. | Manufacturing method ② | Review the microfabrication techniques in the lecture. | 190minutes |
| 11. | Manufacturing method ③ | Review the microfabrication techniques in the lecture. | 190minutes |
| 12. | Manufacturing method ④ | Review the latest MEMS technology in the lecture. | 190minutes |
| 13. | Process Integration, Recent Topics | Review lecture content | 190minutes |
| 14. | Final exam and commentary | Review the content of previous classes | 190minutes |
| Total. | - | - | 2660minutes |
| ways of feedback | specific contents about "Other" |
|---|---|
| 授業内と授業外でフィードバックを行います。 |
Students should thoroughly review physics, mechanics of materials, electrochemistry, etc.
- If you contact us in advance via email, we can accommodate you through online meetings.
- Course that cultivates an ability for utilizing knowledge
| Work experience | Work experience and relevance to the course content if applicable |
|---|---|
| N/A | 該当しない |
- 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
- 12.RESPONSIBLE CONSUMPTION & PRODUCTION
Last modified : Thu Mar 13 04:08:58 JST 2025