Microelectromechanical systems (MEMS) have made remarkable progress in recent years, and with the development of microfabrication
technologies such as semiconductor manufacturing processes, the field has become a combination of various disciplines, including
the application of these technologies to other fields. The scope of this field extends not only to mechanical mechanics, fluid
engineering, heat transfer engineering and materials engineering, but also to basic physics, chemistry and biology. In this
lecture, MEMS systems with such characteristics will be overviewed, and basic related knowledge and some applications will
be discussed.
In this lecture, MEMS systems with the features described in the overview above are reviewed, as well as basic related knowledge
and some application examples.
- To be able to understand basic and theoretical matters relating to micro-sized science and engineering.
- To be able to understand and discuss fundamental phenomena related to micro-sized science and engineering.
- To be able to apply the knowledge of micro-sized science and engineering to the students' own research activities.
| Report 1 | Report 2 | Total. | |
|---|---|---|---|
| 1. | 10% | 10% | 20% |
| 2. | 20% | 20% | 40% |
| 3. | 20% | 20% | 40% |
| Total. | 50% | 50% | - |
A total score of 100 points, with 50% for the Report 1 and 50% for the Report 2, is 60 points or more for a pass.
60 points is the level at which the students understand the theoretical content of the course subjects, can discuss it using relevant basic knowledge, and can apply it to their own research activities.
60 points is the level at which the students understand the theoretical content of the course subjects, can discuss it using relevant basic knowledge, and can apply it to their own research activities.
| Class schedule | HW assignments (Including preparation and review of the class.) | Amount of Time Required | |
|---|---|---|---|
| 1. | Introduction Features of nanomicrosystems |
(Preparation) Review related textbooks. | 100minutes |
| 2. | Basic knowledge | Read the handouts. | 100minutes |
| 3. | Applications in the field of fluid engineering. | Read the handouts. | 100minutes |
| 4. | Applications in the field of heat transfer engineering. | Read the handouts. | 100minutes |
| 5. | Applications in the fields of mechanics, materials engineering and physical / chemical / biological research. | Read the handouts. | 100minutes |
| 6. | Presentation on the report, (final exam and presentation) (1) | Read the handouts. | 100minutes |
| 7. | Presentation on the report, (final exam and presentation) (2) | Read the handouts. Create a report and make a presentation. |
100minutes |
| 8. | 0minutes | ||
| 9. | 0minutes | ||
| 10. | 0minutes | ||
| 11. | 0minutes | ||
| 12. | 0minutes | ||
| 13. | 0minutes | ||
| 14. | 0minutes | ||
| Total. | - | - | 700minutes |
| ways of feedback | specific contents about "Other" |
|---|---|
| Feedback in outside of the class (ScombZ, mail, etc.) |
Materials will be distributed in class according to the assignment.
Review of fluid mechanics, heat transfer engineering, thermodynamics and material mechanics.
- If you have any questions, we will respond accordingly. (For visits, please make an appointment in advance)
- Course that cultivates a basic problem-solving skills
- Course that cultivates an ability for utilizing knowledge
- Course that cultivates a basic interpersonal skills
| Work experience | Work experience and relevance to the course content if applicable |
|---|---|
| Applicable | One of the lecturers had an experience of researching and developing material manufacturing processes at a material manufacturer. He will teach how to apply the hydrodynamic ideas and theories necessary for the development and application of various thermo-fluid processes. |
- 4.QUALITY EDUCATION
- 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
Last modified : Fri Mar 28 02:04:30 JST 2025