Course title
4M9989001
Advanced Micro Machine Engineering

 nagasawa sumito Click to show questionnaire result at 2019
Course content
Micro machine engineering is an engineering field that is applied LSI manufacturing techniques (e.g. photolithography) to fabricating for machine elements. This field is called MEMS (MicroElectroMechanical Systems), systems that electronics and mechanics are fused in micro scale are treated. Unlike the integrated circuit technology, MEMS devices can handle many physical quantities (e.g. acceleration, sound, light, electromagnetic radiation, etc.). That means MEMS devices are available in a wide field applications. Silicon microphone or an acceleration sensor has been already put in practical use, MEMS fields will develop in the future is expected. In this lecture, we learn basics of micro machine engineering, then get deep understanding with reading actual MEMS technical papers.
Purpose of class
Lean fundamental knowledge about MEMS techniques.
Exercise the technical presentation using MEMS referring papers.
Goals and objectives
  1. Understanding basic of MEMS element techniques (e.g. film deposition, vacuum technology, photolithography and etching).
  2. Survey MEMS documents in online, find the target papers, then understand the schematic of those papers.
  3. Reading MEMS papers, understand their concepts and discuss about the usability and improvements with other students participating in this lecture.
Language
Japanese(English accepted)
Class schedule

 Class schedule HW assignments (Including preparation and review of the class.) Amount of Time Required
1． Introduction: What is MEMS, micro-machine technology. Understand distribution handouts, references, reference sites, etc. 60minutes
2． Elementary techniques 1 (thin membrane deposition, vacuum systems). Understand distribution handouts, references, reference sites, etc. 60minutes
3． Elementary techniques 2 (photolithography, etching techniques). Understand distribution handouts, references, reference sites, etc. 60minutes
4． Elementary techniques 3 (micro/nano fabrication techniques). Understand distribution handouts, references, reference sites, etc. 60minutes
5． Elementary techniques 4 (surface micro machining, bulk micro machining). Understand distribution handouts, references, reference sites, etc. 60minutes
6． MEMS Applications 1 (Optical MEMS, Power MEMS) Understand distribution handouts, references, reference sites, etc. 60minutes
7． MEMS Applications 2 (Bio-MEMS, uTAS, RF-MEMS) Understand distribution handouts, references, reference sites, etc. 60minutes
8． MEMS Applications 3 (Micro Robotics, Micro actuators) Understand distribution handouts, references, reference sites, etc. 60minutes
9． Student's presentation 1 Understand distribution handouts, references, reference sites, etc. 60minutes
10． Student's presentation 2 Understand distribution handouts, references, reference sites, etc. 60minutes
11． Student's presentation 3 Understand distribution handouts, references, reference sites, etc. 60minutes
12． Student's presentation 4 Understand distribution handouts, references, reference sites, etc. 60minutes
13． Student's presentation 5 Understand distribution handouts, references, reference sites, etc. 60minutes
14． Student's presentation 6 Understand distribution handouts, references, reference sites, etc. 60minutes
15． Report/Presentation feedback
Total. - - 840minutes
Relationship between 'Goals and Objectives' and 'Course Outcomes'

 Presentation Reports Total.
1. 20% 30% 50%
2. 20% 20%
3. 30% 30%
Total. 70% 30% -
Evaluation method and criteria
70%: the survey presentation about the English papers concerned with MEMS techniques, 30%: individual reports about the micro machine fields. Overall points is 100 points, and passing score is the 60 points or more.
Textbooks and reference materials
Gregory T. Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill Science, ISBN-10: 0072907223, 1998.
This book is good for the graduate students and the newcomer for the MEMS field. English level is easy to understanding.

Marc J. Madou, "Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition," CRC Press, ISBN-10: 0849308267, 2002.
This book is a good text for the MEMS fields. The Third edition of this book is now published but it becomes three-volume set ... the second edition is enough for graduate students and easy to get via internet.
Prerequisites
As there are many good www sites treating the MEMS techniques, search the keywords (e.g. “Micromachine engineering”, “MEMS”) and find out several reference sites.These sites can be great help when you perform your technical paper searching and report writing.
Office hours and How to contact professors for questions
  • Tuesday, lunch time, I'll accept questions. In order to make a answer time certainly, please make an appointment in advance.
Regionally-oriented
Non-regionally-oriented course
Development of social and professional independence
  • Course that cultivates an ability for utilizing knowledge
Active-learning course
About half of the classes are interactive
Course by professor with work experience
Work experience Work experience and relevance to the course content if applicatable
N/A N/A
Education related SDGs:the Sustainable Development Goals
  • 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
  • 12.RESPONSIBLE CONSUMPTION & PRODUCTION
Last modified : Sat Mar 21 13:14:40 JST 2020