Course title
B00190003
Advanced Mechanical Engineering 1 (Nano and Micro)

 YOSHIDA Shinya
Middle-level Diploma Policy (mDP)
Program / Major mDP Goals Courses
Fundamental Mechanical Engineering F 産業界や社会の要請を把握して解決するべき課題を設定し、さまざまな工学分野の知識を関連付けながら設計生産技術を活用することで、立案した構想に従って研究を進め課題を解決することができる。 Sub
Advanced Mechanical Engineering D 機械工学の基盤技術に関わる物理現象の本質を数理的に理解することができる。機械を設計・製作・運用するために必要な手法（計測、制御、設計、加工など）に習熟し、それらを実際の工学的問題に適用することができる。 Main
Environment and Materials Engineering B 地球環境や地域社会との調和を見据えて、さまざまな工学分野に関わる問題を解決することができる。 Sub
Chemistry and Biotechnology B 地球環境や地域社会との調和を見据えて、さまざまな工学分野に関わる問題を解決することができる。 Sub
Electrical Engineering and Robotics D 電気工学や関連する工学の技術分野を課題に適用し、社会の要求を解決するために応用することができる。 Sub
Advanced Electronic Engineering E 専門的デザイン課題について解決する能力を身に付けることができる。 Sub
Information and Communications Engineering F 社会のニーズに対して技術課題を主体的に発見し、工学分野における分野横断的な知識も活用しつつ、計画的・継続的に取り組んで課題を達成することができる。 Sub
Computer Science and Engineering G 技術的課題に対してさまざまな工学分野の知識を関連付けながら主体的に取り組み、継続的に学修する能力を身に付けることができる。 Sub
Urban Infrastructure and Environment G ⼟⽊⼯学における現実の問題について、⼯学・専⾨基礎知識を⽤いて理解・解決することができる。 Sub
Purpose of class
Learn about the principles frequently used in micro-sensors and actuators and their respective characteristics.
Also learn about design and analysis methods for microdevices with simple structures.
Furthermore, learn about the entire process from manufacturing methods to implementation.
Course description
Small sensors and actuators based on MEMS technology are widely used and pervasive in our daily lives.
Examples include fingerprint recognition in smartphones, rotation and tilt detection, wireless earphones, and elastic wave filters for communication.
However, they are so small and out of the public eye that they tend to be black boxes.
In this lecture, we will focus on the technology and principles of micro sensors and actuators, and learn about the history of the underlying physics, engineering, and technology used in these devices, as well as the latest inertial sensors, acoustic sensors, chemical sensors, and biosensors.
Goals and objectives
  1. To understand and explain the basic principles of microsensors and actuators and their respective characteristics.
  2. To design microdevices with simple structures and understands analysis methods.
  3. To have a complete picture of the process from manufacturing methods to implementation.
Relationship between 'Goals and Objectives' and 'Course Outcomes'

 Midterm test Final exam Total.
1. 40% 10% 50%
2. 20% 20%
3. 30% 30%
Total. 40% 60% -
Evaluation method and criteria
Midterm exams account for 40% of the grade, and final exams account for 60%. A score of 60 points or higher is required to pass.
A score of 60 points is defined as demonstrating an understanding of the basic principles of microsensors and actuators, being able to outline the overall process from manufacturing methods to the final product, and being able to partially explain the latest technological trends.
Language
Japanese
Class schedule

 Class schedule HW assignments (Including preparation and review of the class.) Amount of Time Required
1. Overview of MEMS and Micro-Nano Machining Technology Research MEMS, sensors and actuators, and semiconductor microfabrication technology 190minutes
2. Nano/Micro Actuators Review nano- and micro-actuators and related physical phenomena covered in the lectures. 190minutes
3. Nano/Micro Actuators Review nano- and micro-actuators and related physical phenomena covered in the lectures. 190minutes
4. Nano/Micro Sensors Review the sensors and related physical phenomena covered in the lecture. 190minutes
5. Nano/Micro Sensors Review the sensors and related physical phenomena covered in the lecture. 190minutes
6. Nano/Micro Sensors Review the sensors and related physical phenomena covered in the lecture. 190minutes
7. Midterm Exam and Its Explanation Review what was learned in class 190minutes
8. Acoustic wave filter, resonator Review acoustic wave filters, resonators, and related physical phenomena. 190minutes
9. Introduction to Signal Processing Circuits Review electrical circuits and electronic circuits. 190minutes
10. Nano/Microfabrication Review microfabrication techniques. 190minutes
11. Nano/Microfabrication Review microfabrication techniques. 190minutes
12. Nano/Microfabrication Review microfabrication techniques. 190minutes
13. Nano/Microfabrication Review microfabrication techniques. 190minutes
14. Final exam and commentary Review the entire course so far. 190minutes
Total. - - 2660minutes
Feedback on exams, assignments, etc.
ways of feedback specific contents about "Other"
Feedback in/outside the class.
Textbooks and reference materials
参考書：はじめてのMEMS，江刺 正喜 ，森北出版
マイクロセンサ工学、室英夫，藍光郎，石垣武夫，岡山努，石森義雄、技術評論社
Prerequisites
Students should thoroughly review physics, mechanics of materials, electrochemistry, etc.
Office hours and How to contact professors for questions
  • If you contact us in advance via email, we can accommodate you through online meetings.
Regionally-oriented
Non-regionally-oriented course
Development of social and professional independence
  • Course that cultivates an ability for utilizing knowledge
Active-learning course
N/A
Course by professor with work experience
Work experience Work experience and relevance to the course content if applicable
N/A N/A
Education related SDGs:the Sustainable Development Goals
  • 9.INDUSTRY, INNOVATION AND INFRASTRUCTURE
  • 12.RESPONSIBLE CONSUMPTION & PRODUCTION
Last modified : Sat Mar 14 14:09:48 JST 2026